As the world’s No. 1 lithography machine supplier, the Netherlands ASML (ASML) today announced its second quarter 2021 financial report.
In the quarter, ASML had net sales of 4 billion euros, gross profit margin of 50.9%, net income of 1 billion euros, and net bookings of 8.3 billion euros, of which EUV extreme ultraviolet lithography machines had 4.9 billion euros, while the total backlog of orders amounted to 4.9 billion euros. has reached 17.5 billion euros.
ASML also disclosed in the financial report that the first new TWINSCAN NXE: 3600D EUV lithography machine system has been delivered to customers, which has increased productivity by 15-20% compared to the previous NXE: 3400C, and the coverage rate (overlay accuracy) has increased by about 30%.
However, ASML did not disclose which one of the receiving customers was.
ASML also stated that it is working hard to increase the mass production application of EUV lithography machines in the storage industry, and plans to assist three DRAM memory chip customers to introduce EUV in future process nodes.
ASML EUV lithography machine is still the first generation product, the EUV light source wavelength is about 13.5nm, the objective lens NA numerical aperture is 0.33, and a series of models have been developed.
The earliest mass-produced factory is NXE:3400B, which has limited production capacity and wafer production capacity of only 125PWH. The current main shipment is NXE:3400C, and the production capacity has been increased to 135WPH, while the latest NXE:3600D capacity has been further increased to 160WPH, and the price is said to have reached 145 million US dollars (about 938 million yuan).
The second-generation EUV lithography machine will be the NXE:5000 series, and the NA of the objective lens will be increased to 0.55 to further improve the lithography accuracy. One hundred million U.S. dollars.
In the third quarter, ASML expects net sales of 5.2-5.4 billion euros and a gross profit margin of 51-53%.